Interdigitated Electrode Arrays for Biochemical Sensors
Description
Interdigitated electrode arrays for biochemical sensors on sitall or glass support with 150 nm Au layer and 10, 20, 30 or 50 interdigital gap.
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System Specifications
Material of support
– sitall (crystalline glass-ceramic with ultra low coefficient of thermal expansion)
– glass
– glass
Interdigital gap
L = 1mm, W(finger) = 20um for all electrode models.
– sital: S(gap) = 10um, 20um, 30um, 50um
– glass: S(gap) = 10um, 20um, 30um, 50um
– sital: S(gap) = 10um, 20um, 30um, 50um
– glass: S(gap) = 10um, 20um, 30um, 50um
Size of support
18mm x 5mm x 0.4mm
28mm x 5mm x 0.4mm
25mm x 35mm x 1mm (same pattern as 18mm x 5mm electrodes)
28mm x 5mm x 0.4mm
25mm x 35mm x 1mm (same pattern as 18mm x 5mm electrodes)
Au layer (height)
150 nm
Cr underlayer
5 nm
Number of interdigit pairs
20 (40 fingers in total: 20 for left contact and 20 for right contact)
Area of each system
10 um – 1.25 mm2
20 um – 1.65 mm2
30 um – 2.0 mm2
50 um – 2.8 mm2
20 um – 1.65 mm2
30 um – 2.0 mm2
50 um – 2.8 mm2
Number of electrode arrays on the slide
2
